# 中国国产DUV光刻机进入量产阶段

- 来源：Chubby♨️ (@kimmonismus)
- 发布时间：2026-07-27 22:40
- AIHOT 分数：65
- AIHOT 链接：https://aihot.virxact.com/items/cms3cmz9i0aawro3flrgwavt8
- 原文链接：https://x.com/kimmonismus/status/2081751557989642730

## AI 摘要

一家上海国资背景企业计划今年生产5台国产浸没式DUV光刻机，2027年扩至约20台。首批设备将交付中芯国际、华虹和长鑫存储。这意味着中国在半导体供应链最艰难的光刻环节实现突破，绕开ASML垄断和西方出口管制。

## 正文

Holy China did it： a homegrown alternative to ASML's immersion DUV lithography machines is now entering production.

Lithography was considered one of the hardest parts of the semiconductor supply chain for China to reproduce. ASML dominates advanced DUV equipment and remains the world's only supplier of EUV systems.

Western export controls were built around this bottleneck： without continued access to ASML's machines and servicing， Chinese chipmakers were expected to fall further behind.

Now， a state-backed Shanghai company reportedly plans to build five domestic DUV systems this year and around 20 in 2027. The first machines will go to SMIC， Hua Hong and CXMT.

lithography was one of the hardest gaps in China's semiconductor supply chain. And they figured out a solution. This is insane.